HAN'S LASER FALO Series PECVD

Key Features & Advantages

• Continuous Film
• The HAN'S LASER FALO Series PECVD boasts a remarkable ability to seamlessly switch between various film types, enabling manufacturers to diversify their product offerings without compromising on productivity or quality. This flexibility streamlines production processes and enhances overall operational efficiency.

• Revolutionary Boat Pushing Mechanism
• At the heart of its reliability and speed lies a patented boat pushing mechanism, strategically positioned at both ends. This innovative design eliminates jitter, significantly improves load capacity, and accelerates the boat entry and exit process 20 seconds (excluding boat handling time). This not only enhances process stability but also contributes to increased throughput and reduced downtime.

• Patented Double Furnace Door Mechanism
• To minimize heat loss and optimize energy efficiency, the system incorporates a specially shaped double furnace door structure, a patented feature that ensures minimal thermal escape during operation. This design not only reduces operational costs but also contributes to a more stable and controlled deposition environment.

• Graphite Boat Electrode Technology
• advanced graphite boat electrode technology, the HAN'S LASER FALO Series PECVD ensures optimal electric contact through its electrode surface, complemented by front and rear electrodes with an adjustable tail electrode located outside the furnace tube. This setup ensures uniform current distribution and improved process control, resulting in superior film quality.

• Rapid Cooling Furnace Body
• Employing the latest patented technology, the furnace body is designed for rapid cooling, enabling the system to swiftly reduce the furnace temperature to the desired level. This enhancement increases the by over 25%, significantly improving temperature uniformity within the furnace tube and ensuring precise control over the deposition process.

• In conclusion, the HAN'S LASER FALO Series PECVD is a game-changing solution for manufacturers seeking precision, efficiency, and reliability in their deposition processes. With its cutting-edge features and patented technologies, this system sets the standard for high-performance material deposition across various industries.