High-Capacity & Advanced Process: Boasting a mature high-capacity process, HAN'S LASER PECVD incorporates dual-mode temperature control technology and film gauge protection technology, ensuring precise and consistent film deposition.
Patented Push-Pull Mechanism: Supported at both ends, mechanism eliminates jitter, enhances speed by 30%, increases load capacity, and significantly improves operational reliability. Boat entry and exit times are optimized to no more than 20 seconds (excluding boat handling).
Rapid Cooling Furnace Body: Featuring the latest patented technology, the furnace body rapidly cools down to the desired temperature, achieving over 25% increase in cooling rate. This improvement significantly enhances temperature uniformity within the furnace tube.
Innovative Boat Storage Cooling: The patented parallel heat dissipation method storage positions improves cooling efficiency, reducing cooling time by more than 15%. Additionally, it optimizes air intake flow to maintain superior internal cleanliness of the console.
HAN'S LASER PECVD stands as a testament to the convergence of advanced materials science, precision engineering, and automation in the realm of solar cell manufacturing. Its ability to deposit superior quality anti-reflection silicon nitride films, coupled with its robust design and innovative features, positions it as the go-to solution for manufacturers seeking to elevate the efficiency and their PERC/TOPCon cell production lines. Embrace the future of solar energy with HAN'S LASER PECVD.
| Item | Technical Parameter |
| Types of film formation | SiO、SiON 、SiN |
| Loading size | 210mm（166mm，182mm，230mm can be compatible） |
| Loading capacity | 680pcs/batch （166mm） ,620pcs/batch （182mm） ,504pcs/batch （210mm） ,432pcs/batch （230mm） |
| Coating thickness uniformity | Intra-piece ≤4%;Inter-piece ≤4%; Inter-batch ≤3%（166/182mm） Intra-piece ≤5%; Inter-piece ≤5%; Inter-batch ≤3%（210/230mm） |
| UP-TIME | ≥98% |
| Range of working temperature | 100~600°C |
| Temperature control | 6-point temperature control, internal and external dual-mode control |
| Warming-up method | Automatic slope heating and fast constant temperature function |
| Cooling method | The latest patented technology, 6 temperature zone section control active cooling furnace body |
| Accuracy and length of constant temperature zone | ±1°C/2500mm(500°C) |
| Single point temperature stability | <±1°C/4h(500°C) |
| Warming-up time | RT 450°C≤30min |
| Temperature control | Dual-mode precise control |
| The ultimate vacuum of the system | <3Pa |
| System air leak rate | The rate of pressure rise after the pump is stopped and the valve is closed :＜1Pa /min |
| Pressure control method | Quickly adjust fully automatic closed loop |
| Process control method | Fully automatic process control, multiple safety chain alarms |
| Human-computer Interactive interface | LCD display, touch operation, process editing, online monitoring, authority management, team management, networking functions |
| MES/CCRM | Equipped |
